Dual Magnetron Sputtering
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The schematic shows Bipolar Pulse (BP) application using a dual magnetron system.
Using the electronic equivalent network diagram of the magnetron the diode function is alternated in accordance
to the output polarity of the pulse unit. The magnetron being sputtered alternates as well. Due to the very short
switching times of the pulse unit the function of the inductances within the circuit will change from a load to a source
in a very short time. This causes a reverse voltage impulse which drives the current down to zero without any overshoot
current. The functionality of the electrical circuit is thus comparable to the delta function.
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