Dual Magnetron Sputtering

The schematic shows Bipolar Pulse (BP) application using a dual magnetron system.




Using the electronic equivalent network diagram of the magnetron the diode function is alternated in accordance to the output polarity of the pulse unit. The magnetron being sputtered alternates as well. Due to the very short switching times of the pulse unit the function of the inductances within the circuit will change from a load to a source in a very short time. This causes a reverse voltage impulse which drives the current down to zero without any overshoot current. The functionality of the electrical circuit is thus comparable to the delta function.

With the proper unit configuration so called "symmetric" and "asymmetric" bipolar pulse pulse can be generated. The asymmetric pulse mode using two DC-Units can be implemented for example in Co-Sputtering applications using a Dual Magnetron configuration with different target material. See the diagramms below.