Equivalent circuit diagram of HiPIMS Pulse Unit and Single Magnetrons.

The electric / electronic equivalent network diagram of a magnetron is a dynamic impedance and a diode. The sputtering diode is very sensitive by increasing the pulse voltage level. In case of a low plasma impedance the pulse peak current will increase to a high level range. Our Pulse DC Power Controller has the capability to deliver the stored electric energy from a capacitor. During the pulse ON - time the capacitor is connected directly with the plasma load via the power transistors and small Inductances. The Figure 1.) shows the basic principle to generate high power impulses to the plasma load. By use of the Fourier Transformation higher pulse peak power will generate harmonic components with higher frequencies and higher amplitudes.

Oscilloscope Measurement unipolar (UP) Mode
CH1: HiPIMS Voltage Measurement,
CH2: HiPIMS Current Measurement