Measurement System
MS – Type: 500A/1000V – 1000A/1000V
The MELEC measuring system (MS) offers a simple way to record your process. The MS measures up to four channels (2 x U and 2 x I), voltages up to +/-1000V and currents up to +/-1000A.
The MS can be integrated into system racks containing the voltage and current transducers or used independently in combination with terminal boxes (TB). These terminal boxes contain the voltage and current transducers in a sturdy metal housing. The MS is used to acquire and normalizes voltage/current signals in magnetron sputtering applications. High-quality voltage and current transducers from LEM are used to acquire high-voltage and current signals safely and reliably.
- U Ratio: 0V-1000V = 0V-5V attenuation: x200
- Voltage BW: DC-300kHZ
- I Ratio: 0A-500 A / 1000A = 0V-5V attenuation: x100 (500A) / x200 (1000A)
- Current BW: DC-200kHZ
- 1 U/125mm depth
- TB (Terminal Box) includes voltage and current transducer (option)
Process Monitoring:
Easily scope and analyze HiPIMS or other voltage and current signals for improved diagnostics and process optimization.
Safety:
The galvanically isolated transducers ensure maximum electrical safety, allowing for secure and hassle-free process diagnostics
High-Voltage & Current Capture:
Uses high-quality LEM transducers for precise signal measurement. Voltage BW up to 300kHz and Current BW up to 200kHz for high-speed and dynamic plasma processes.
Flexible Integration:
Can be mounted in system racks or used as a stand-alone solution with Terminal Boxes (TB) for versatile deployment.
Compact & Space-Efficient Design:
The 1U / 125mm depth format allows for easy installation without requiring extensive space.
Magnetron Sputtering Process Monitoring:
Captures and normalizes voltage/current signals in magnetron sputtering applications for plasma diagnostics.
Research & Development:
Ideal for laboratory environments requiring detailed electrical signal analysis.
Maintenance:
Reducing Downtime is key. The MS can help finding issues fast and early.
- PVD
- PECVD
- PEO
